| 发明名称 |
Diamond coatings on reactor wall and method of manufacturing thereof |
| 摘要 |
<p>A corrosion resistant component of semiconductor processing equipment such as a plasma chamber includes a diamond containing surface and process for manufacture thereof.</p> |
| 申请公布号 |
KR100853972(B1) |
申请公布日期 |
2008.08.25 |
| 申请号 |
KR20037008678 |
申请日期 |
2003.06.26 |
| 申请人 |
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发明人 |
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| 分类号 |
C23C14/06;C23C16/44;B01J19/02;C23C16/02;C23C16/27;C23C30/00;H01J37/32;H01L21/205;H01L21/3065 |
主分类号 |
C23C14/06 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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