发明名称 PROBE CARD STRUCTURE FOR TESTING SEMICONDUCTOR DEVICE
摘要 PURPOSE: A probe card is provided to increase the number of tested semiconductor devices by improving a structure. CONSTITUTION: A probe card comprises holes(3) formed in center portions, a plurality of contact pads(5) connected to pogo pins, needles(4) fixed around the holes(3), and a PCB(Printed Circuit Board)(2) connected with the contact pads(5). At this point, the needles(4) are respectively connected with the contact pads(5). Because of forming a pair of holes(3), the needles(4) formed around the holes(3) have a double number, so that the contact pads(5) respectively connected with the needles(4) are double, thereby increasing the number of tested semiconductor devices when performing an electrical test of a wafer.
申请公布号 KR20020051660(A) 申请公布日期 2002.06.29
申请号 KR20000081122 申请日期 2000.12.23
申请人 HYNIX SEMICONDUCTOR INC. 发明人 KANG, BYEONG WON
分类号 H01L21/66;(IPC1-7):H01L21/66 主分类号 H01L21/66
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