| 摘要 |
<p>PROBLEM TO BE SOLVED: To raise contrast level of the FIB image by increasing the secondary electron collection efficiency of the secondary electron detection system in the focusing ion beam device(FIB). SOLUTION: Secondary electron collection efficiency is achieved nearly 100% for majority part of the effective range of the secondary electron energy by a scintillation detector assembly that is used for detecting secondary electron in the focusing ion beam(FIB). The insulator inside this assembly is arranged completely out of the route of the secondary electron so as to avoid generation of arc that will give a bad influence on the FIB secondary electron image forming. Further, a gap is provided between the grounding potential cap member and the scintillation detector, thereby the above high efficiency of secondary electron collection is maintained and improvement in reliability of the system is realized. By arranging this scintillation detector assembly adjacent to the primary ion beam, secondary electron collection efficiency is further increased.</p> |
