| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide an apparatus for grasping a wafer in which grasping of a wafer can be confirmed using a single detecting means. SOLUTION: The apparatus for grasping a wafer comprises a drive means 2 having a presser 8 advancing retractably in the longitudinal direction, and means 9 for detecting advance/retract of the pressor 8. When the detecting means 9 detects the pressor 8 advanced up to a specified position and stopped thereat, a decision is made that a wafer is grasped normally. When the detecting means 9 detects the pressor 8 advanced over the specified position, a decision is made that no wafer is present on the apparatus for grasping a wafer.</p> |
