发明名称 APPARATUS FOR GRASPING THIN PLATE MATERIAL
摘要 <p>PROBLEM TO BE SOLVED: To solve the problem of a prior art apparatus for grasping a thin plate material that the surface of a thin plate material is damaged, a holding hole must be bored and the structure is intricate. SOLUTION: When the air in a suction passage 9 is sucked by means of a vacuum pump, the outer edge part 10a of a thin plate material 10 is vacuum sucked to the grasping part 2a of an upper plate 2 and the grasping part 3a of a lower plate 3. Since only the outer edge part 10a of the thin plate material 10 can be grasped, the surface of the thin plate material 10 is not damaged. Furthermore, manufacturing cost increase can be prevented because the structure of the grasping apparatus is simple.</p>
申请公布号 JP2002184849(A) 申请公布日期 2002.06.28
申请号 JP20000376954 申请日期 2000.12.12
申请人 SANKI ENGINEERING KK 发明人 ASAMURA MASAO
分类号 B25J15/06;H01L21/68;H01L21/683;(IPC1-7):H01L21/68 主分类号 B25J15/06
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