发明名称 CLEANING GAS FOR PLASMA DISPLAY PANEL AND MANUFACTURING METHOD OF PLASMA DISPLAY PANEL USING THE SAME
摘要 PROBLEM TO BE SOLVED: To provide a cleaning gas for plasma display panel that can improve the cleanliness of the discharging space and the exhausting efficiency and a manufacturing method of a plasma display panel using the same. SOLUTION: O2 gas and a rare gas, especially Ne gas and/or Ar gas are contained in the cleaning gas for PDP. The O2 gas resolves the carbon compound having a high molecular weight such as siloxane and generates a molecule having a relatively small molecular weight such as H2O and CO2. Accordingly, when Ne molecule and Ar molecule crash against the H2O and CO2 molecules generated by the resolution by O2 gas, H2O and CO2 molecules are sprung out as their weight of molecule are relatively similar, and Ne and Ar molecules remain in the discharging space. While H2O molecule and CO2 molecule are easily adsorbed by the MgO membrane, Ne molecule and Ar molecule are hardly adsorbed by the MgO membrane.
申请公布号 JP2002184310(A) 申请公布日期 2002.06.28
申请号 JP20000375940 申请日期 2000.12.11
申请人 NEC CORP 发明人 HAYASHI TOSHIMITSU;OGURA TAKESHI
分类号 H01J9/38;H01J11/20;H01J11/44;(IPC1-7):H01J9/38;H01J11/02 主分类号 H01J9/38
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