TRANSFER METHOD FOR ELEMENT, ELEMENT HOLDING SUBSTRATE AND FORMATION METHOD THEREFOR

摘要

PROBLEM TO BE SOLVED: To provide the transfer method of an element, the manufacturing method of an element holding substrate and the element holding substrate with which transfer in a short time is enabled, without increasing processes or lowering the yield of the transfer. SOLUTION: The boundary of a first substrate 10 and a light-emitting diode 12 formed on the first substrate 10 is selectively irradiated with energy beams, while transmitting them through the first substrate 10 and the light-emitting diode 12 is selectively peeled off. The light-emitting diode 12 is transferred to an element holding layer 13 formed on the element holding substrate and then transferred to a second substrate 18 further. By the irradiation of the boundary with the energy beams, the element is easily peeled off.