| 摘要 |
PROBLEM TO BE SOLVED: To provide a current introduction terminal capable of absorbing a stress due to a difference in thermal expansion even if the difference in thermal expansion generates in a mounting part. SOLUTION: A current introduction terminal 10 comprises a conductive rod 12 which has one end provided with a first connection part 14 connected to an electric apparatus 18, and the other end provided with a second connection part 16 connected to another electric apparatus 22; a cylinder 24 surrounding the conductive rod; and bellows 32 mounted between the cylinder and the conductive rod. The conductive rod can move three-dimensionally relative to the cylinder. Accordingly, for example, the cylinder 24 is airtightly fixed to a stage 3 of a substrate supporting device 1, and in a state that the conductive rod is connected to an electric heater 5 in a pedestal 2, even if a difference in thermal expansion occurs between the stage and the pedestal, it is possible to absorb a stress by operation of the conductive rod.
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