METHOD AND DEVICE FOR CORRECTING PROCESS DATA

摘要

PROBLEM TO BE SOLVED: To provide a method and device for correcting process data by which a processing unit is enabled to perform proper deposition by automatically and reasonably correcting the process data of the processing unit. SOLUTION: The process data obtained when the processing unit 31 performs deposition and inspection data obtained when an inspection device 41 inspects the film formed by means of the unit 31 for its state are acquired. From the process data and inspection data, the corrected value of the process data required to enable the unit 31 to properly perform deposition is found. The found corrected value of the process data is fed back to the unit 31 to cause the unit 31 to perform the deposition based on the corrected value. Consequently, the process data of the processing unit 31 can be corrected automatically and reasonably and the unit 31 can perform proper deposition.