发明名称 CLEANING DEVICE AND METHOD THEREFOR
摘要 PROBLEM TO BE SOLVED: To provide a cleaning device and method for inhibiting the adhesion of impurities such as dust on a body to be cleaned, improving the substitution efficiency of cleaning liquid in a cleaning bath, and reducing treatment time. SOLUTION: The cleaning device 1 for cleaning a body to be cleaned by dipping it into cleaning liquid comprises a cleaning bath 1 for receiving the cleaning liquid L for cleaning the body W to be cleaned, a first cleaning liquid supply means 15a that is provided at the upper section of the cleaning bath 11 and supplies first washing liquid into the cleaning bath 11, and cleaning liquid exhaust means (17, 18, and 19) that are provided at the lower portion of the cleaning bath 11 and discharge the washing liquid L in the cleaning bath 11.
申请公布号 JP2002184736(A) 申请公布日期 2002.06.28
申请号 JP20000379428 申请日期 2000.12.13
申请人 SONY CORP 发明人 SHIKI YOSHIMICHI
分类号 B08B3/04;H01L21/304;(IPC1-7):H01L21/304 主分类号 B08B3/04
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