发明名称 MAGNETORESISTIVE MAGNETIC HEAD AND METHOD FOR MANUFACTURING IT
摘要 PROBLEM TO BE SOLVED: To provide a magnetoresistive magnetic head made correspondent to narrow tracks and a method for manufacturing the magnetic head by which the level difference in the base is eliminated when the lead head track of the magnetoresistive magnetic head is formed, and degradation in the dielectric voltage due to overetching is prevented when the magnetoresistance film is patterned by etching. SOLUTION: The level difference in the base when a photoresist pattern is formed during forming the track width for the lead head is eliminated while conrolling the overetching amount and thickness of deposited films so as to allow the uppermost surface of a magnetoresistance film 30, the uppermost surface of a magnetic domain conrolling film 50 and the uppermost surface of a protective insulating film 40 to be on one plane. In the laminated magnetoresistance film, a first ferromagnetic layer which changes the magnetization direction by the magnetic field of an external magnetic recording medium is not present under the magnetic domain controlling film 50 but layers except the first ferromagnetic layer, such as a second ferromagnetic layer having the magnetization direction fixed, or an adhesion layer, magnetostriction controlling layer, separation layer or the like is made present as a part of thickness of layers.
申请公布号 JP2002183912(A) 申请公布日期 2002.06.28
申请号 JP20000376352 申请日期 2000.12.11
申请人 HITACHI LTD 发明人 TANAKA ATSUKO;KOMURO MATAHIRO
分类号 G01R33/09;G11B5/39;H01L43/08;(IPC1-7):G11B5/39 主分类号 G01R33/09
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