MOUNTING STRUCTURE OF SUSCEPTOR TO CHAMBER AND SUPPORT MEMBER OF THE SUSCEPTOR TO THE CHAMBER

摘要

PROBLEM TO BE SOLVED: To form a through hole in a support member in a mounting structure of a susceptor to a chamber, and control low temperatures of an end part on a chamber side of the support member, and suppress heat to be transmitted in the support member from the susceptor. SOLUTION: A mounting structure comprises a susceptor for heating a processing object, a support member 7 which is joined to a joining surface 2b of the susceptor and is provided with an inside space 6A, and a chamber 10 provided with an aperture 10b joined to the support member 7. An outside contour 7f of a cross-sectional surface of the support member 7 is in a substantial real circular shape, and the support member 10 has a thick part and a thin part. In the thick part of the support member 10, through holes 8A, 8B extending from an end surface 7g on a susceptor side to an end surface 7e on a chamber 10 side are provided.