| 摘要 |
PROBLEM TO BE SOLVED: To provide a sheet-shaped connector wherein the diameter of a surface electrode is small, a superior electrically connecting state can be surely obtained to a circuit device in which pitches between electrodes are small, strength of the surface electrode is high and a superior electrically connecting state can be maintained in the case of repetition use, its manufacturing method and a probe device having the sheet-shaped connector. SOLUTION: This sheet-shaped connector is provided with an insulating sheet and a plurality of electrode structures which are arranged on the insulating sheet. The protruded surface electrodes exposed on a surface of the insulating sheet and the back electrodes exposed on a back of the insulating sheet are linked with each other, by using short-circuit parts which are stretched penetrating the insulating sheet in the thickness direction. The surface electrodes in the respective electrode structures are formed by plating, preferably, chemical plating. It is preferable that the back electrodes are formed by laminating metal layers which are formed by chemical plating on base layers which are formed by etching metal thin layers.
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