PLATE MATERIAL FOR HEATING SUBSTRATE, AND METHOD OF MANUFACTURING CADMIUM TELLURIDE FILM

摘要

PROBLEM TO BE SOLVED: To provide a plate material for heating a substrate over its entire surface with a uniform temperature distribution in a process of preparing a semiconductor device such as solar cell, and also to provide a method for manufacturing a large-area CdTe film having a uniform thickness. SOLUTION: A thermal conductivity of a plate material for heating a substrate installed between a heat source and the substrate in its thickness direction is made smaller than the thermal conductivity in its surface direction. A CdTe film is manufactured by close-spaced sublimation by surface-contacting the plate material with at least one of a source substrate and a film formation substrate.