| 摘要 |
PROBLEM TO BE SOLVED: To realize the prevention of a quartz bell-jar from being damaged, due to transporting, etc., to a drier for cleaning and drying the large-type quartz bell-jar. SOLUTION: A gas-jetting flexible nozzle 18 is provided for making liquid drops deposited to a quartz bell-jar 11 and the inner wall of a case 13 to fly, thereby blow-drying after cleaning with pure water. This properly harmonizes and integrates a cleaner and a drier bell-jar, the mutually conflicting apparatus, and hence by eliminating the step itself of transferring from the cleaner to the drier, prevention of the bell-jar from being damaged due to transfer, etc., to the drier is realized.
|
