| 摘要 |
<p>An apparatus for manufacturing a DLC-film-coated plastic container in which foreign matters adhering to an inner electrode can be removed by cleaning without decomposing the apparatus, a method of manufacturing the same, and a method for cleaning the inner electrode are disclosed. The apparatus (100) is characterized by having an output change-over mechanism (30) capable of connecting an inner electrode (9) to the earth and connecting an outer electrode (3) to a matching box (14) during the formation of a DLC film, and connecting the inner electrode (9) the matching box (14) and connecting the outer electrode (3) to the earth during the cleaning of the inner electrode.</p> |
