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经营范围
发明名称
Turbomolekularpumpe und deren Betriebsverfahren.
摘要
申请公布号
DE68901986(T3)
申请公布日期
2002.06.27
申请号
DE1989601986T
申请日期
1989.03.06
申请人
KABUSHIKI KAISHA TOSHIBA, KAWASAKI;EBARA CORP., TOKIO/TOKYO
发明人
OKUMURA, KATSUYA;KURIYAMA, FUMIO;MURAI, YUKIO;TSUJIMURA, MANABU;SOBUKAWA, HIROSHI
分类号
F04B37/06;F04D19/04;(IPC1-7):F04D19/04
主分类号
F04B37/06
代理机构
代理人
主权项
地址
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