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发明名称
Verfahren zur Herstellung eines mikroelektronischen Bauelements
摘要
申请公布号
DE10041685(C2)
申请公布日期
2002.06.27
申请号
DE20001041685
申请日期
2000.08.24
申请人
INFINEON TECHNOLOGIES AG
发明人
HARTNER, WALTER;SCHINDLER, GUENTHER;GABRIC, ZVONIMIR
分类号
H01L27/105;H01L21/02;H01L21/768;H01L21/8242;H01L21/8246;H01L27/108;(IPC1-7):H01L21/823
主分类号
H01L27/105
代理机构
代理人
主权项
地址
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