发明名称 Lower electrode isolation in a double-wide trench
摘要 The invention relates to a phase-change memory device. The device includes a double-wide trench into which a single film is deposited but two isolated lower electrodes are formed therefrom. Additionally a diode stack is formed that communicates to the lower electrode. Additionally, other isolated lower electrodes may be formed along a symmetry line that is orthogonal to the first two isolated lower electrodes. The present invention also relates to a method of making a phase-change memory device. The method includes forming two orthogonal and intersecting isolation structure s around a memory cell structure diode stack.
申请公布号 US2002079524(A1) 申请公布日期 2002.06.27
申请号 US20000749127 申请日期 2000.12.26
申请人 DENNISON CHARLES 发明人 DENNISON CHARLES
分类号 G11C8/02;H01L27/24;(IPC1-7):H01L27/108 主分类号 G11C8/02
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