发明名称 Semiconductor laser and method of producing the same
摘要 A semiconductor laser having a lower clad layer, an active layer, a first upper clad layer and a dry-etching stop layer, all the layers being successively laminated on a compound semiconductor substrate. The semiconductor laser further includes (i) a second upper clad layer, in the form of a ridge, formed above the first upper clad layer, (ii) an etching stop layer present only between the dry-etching stop layer and the second upper clad layer, and (iii) block layers formed at sides of the second upper clad layer.
申请公布号 US2002080837(A1) 申请公布日期 2002.06.27
申请号 US20010020908 申请日期 2001.12.19
申请人 MURAYAMA MINORU 发明人 MURAYAMA MINORU
分类号 H01L21/205;H01S5/20;H01S5/223;(IPC1-7):H01S5/00 主分类号 H01L21/205
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