发明名称 APPARATUS FOR EVAPORATION OF MATERIALS FOR COATING OF OBJECTS
摘要 <p>Apparatus for evaporation of materials for coating of objects by a physical method (PVD) using low voltage electric arc, such apparatus being equipped with a source (4a, 4b, 4) of magnetic field and an anode (3) and a cathode (2a, 2b, 2) of electric arc. At least one cathode (2a, 2b, 2) and at least one source (4a, 4b, 4) of magnetic field can pivot in the coating chamber (1).</p>
申请公布号 WO2002050864(A1) 申请公布日期 2002.06.27
申请号 CZ2001000075 申请日期 2001.12.14
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