| 摘要 |
PURPOSE: A method for forming a spacer electrode of a field emission display device is provided to achieve a desired spacer electrode pattern by one deposition after the mask, which is fabricated by using photosensitive glass, is aligned. CONSTITUTION: A chrome mask having a shape of a spacer electrode is aligned on a glass(420). A vertical exposure process for the glass(420) is performed. The first thermal process for the glass(420) is performed under temperature of 500°C. The second thermal process for the glass(420) is performed under temperature of 600°C. The glass(420) is etched by using HF solution of 10%. An exposed portion is removed by the etch process. A groove(440) is formed by removing the exposed portion.
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