发明名称 |
APPARATUS FOR MANUFACTURING DLC-FILM-COATED PLASTIC CONTAINER, METHOD OF MANUFACTURING THE SAME, AND METHOD FOR CLEANING INNER ELECTRODE |
摘要 |
An apparatus for manufacturing a DLC-film-coated plastic container in which foreign matters adhering to an inner electrode can be removed by cleaning without decomposing the apparatus, a method of manufacturing the same, and a method for cleaning the inner electrode are disclosed. The apparatus (100) is characterized by having an output change-over mechanism (30) capable of connecting an inner electrode (9) to the earth and connecting an outer electrode (3) to a matching box (14) during the formation of a DLC film, and connecting the inner electrode (9) the matching box (14) and connecting the outer electrode (3) to the earth during the cleaning of the inner electrode.
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申请公布号 |
WO0249925(A1) |
申请公布日期 |
2002.06.27 |
申请号 |
WO2000JP09100 |
申请日期 |
2000.12.21 |
申请人 |
MITSUBISHI SHOJI PLASTICS CORPORATION;YOUTEC CO., LTD.;HAMA, KENICHI;KAGE, TSUYOSHI;KOBAYASHI, TAKUMI;ARAKI, TOMOYUKI |
发明人 |
HAMA, KENICHI;KAGE, TSUYOSHI;KOBAYASHI, TAKUMI;ARAKI, TOMOYUKI |
分类号 |
C23C16/04;C23C16/26;C23C16/44;C23C16/509;(IPC1-7):B65D1/00;C08J7/06;C23C16/27 |
主分类号 |
C23C16/04 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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