发明名称 Sound enhanced lapping apparatus
摘要 A method of lapping semiconductor wafers includes the step of transmitting sounds generated during the lapping process to a receiver, allowing the operator to use sound to more quickly detect problems associated with starting the lap process.
申请公布号 US2002081953(A1) 申请公布日期 2002.06.27
申请号 US20020084297 申请日期 2002.02.25
申请人 FITZGERALD BETTINA M.;SWANSON KARL D.;ZINSER DEBRA L. 发明人 FITZGERALD BETTINA M.;SWANSON KARL D.;ZINSER DEBRA L.
分类号 B24B49/00;(IPC1-7):B24B7/00 主分类号 B24B49/00
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