发明名称 Electrical detection of V-groove width
摘要 The present invention generally relates to electrical detection of V-groove width during the fabrication of photosensitive chips, which create electrical signals from an original image, as would be found, for example, in a digital scanner or facsimile machine.
申请公布号 US2002079918(A1) 申请公布日期 2002.06.27
申请号 US20010039741 申请日期 2001.10.29
申请人 XEROX CORPORATION 发明人 HOSIER PAUL A.;BROWNE PAUL W.;TEWINKLE SCOTT L.
分类号 H01L21/66;(IPC1-7):G01R31/26;G01R31/26 主分类号 H01L21/66
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