| 摘要 |
In cleaning operation using dry ice pellets, a bridging phenomenon of the dry ice pellets occurs. Also, static electricity is generated, so a good cleaning effect cannot be obtained. This invention is directed to solve these problems. In order to solve these problems, a cleaning apparatus has a blast nozzle, a device for pneumatically feeding a carrier gas to the blast nozzle, and a device for supplying dry ice pellets to the blast nozzle, and blasts a cleaning object (W) with the dry ice pellets, together with the carrier gas, from the blast nozzle, thereby cleaning a surface of the cleaning object (W). This cleaning apparatus includes an air supplying device for supplying destaticizing air to a cleaning portion of the cleaning object (W) to be cleaned by the blast nozzle, and a charging device for charging the destaticizing air with a polarity opposite to the polarity of the charged dry ice pellets.
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