发明名称 |
Scanning charged-particle microscope |
摘要 |
In order to supply a scanning charged-particle microscope that can achieve both the improvement of resolution and that of focal depth at the same time, a scanning charged-particle microscope is supplied which is characterized in that a passage aperture for limiting the passage of the charged-particle optical beam is located between the charged-particle source and the scanning deflector, and in that a member for limiting the passage of the charged-particle optical beam is provided at least in the center of the passage aperture.
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申请公布号 |
US2002079448(A1) |
申请公布日期 |
2002.06.27 |
申请号 |
US20010943262 |
申请日期 |
2001.08.30 |
申请人 |
ISHITANI TOHRU;TODOKORO HIDEO;SATO MITSUGU |
发明人 |
ISHITANI TOHRU;TODOKORO HIDEO;SATO MITSUGU |
分类号 |
H01J37/09;H01J37/28;(IPC1-7):H01J37/256 |
主分类号 |
H01J37/09 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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