发明名称 Semiconductor device and method of fabricating the same
摘要 A semiconductor device is provided with a semiconductor substrate, a gate insulation film formed on the semiconductor substrate, a gate electrode formed on the gate insulation film and having a portion increasing upward in the length along a gate length direction, a side wall formed on a side surface of the gate electrode so as to be covered behind a top part of the gate electrode as seen in plan view, and an interlayer insulation film covering the gate electrode. The side wall is in contact with the interlayer insulation film.
申请公布号 US2002079525(A1) 申请公布日期 2002.06.27
申请号 US20010036955 申请日期 2001.12.20
申请人 NEC CORPORATION 发明人 MAYUZUMI SATORU
分类号 H01L29/417;H01L21/28;H01L21/336;H01L21/768;H01L21/8244;H01L27/11;H01L29/423;H01L29/78;(IPC1-7):H01L31/119;H01L29/94;H01L29/76;H01L27/108 主分类号 H01L29/417
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