发明名称 Formsimulationsverfahren
摘要 A region, to which a volume ratio "1" is allocated in an analysis region (100a), is divided into a first and a second type of cells (C3, C4). A third cell (C1) is arranged in immediate proximity to and above the first cell (C3), and the volume ratio "0" is allocated to the third cell (C1). Relative to the direction in which the third and the first cells (C1, C3) are arranged in immediate proximity to each other, the two cells (C1, C3) are matched in such a way that they have the same width. By interpolation of the volume ratio, the result gives the position, at which the volume ratio 0.5 occurs, at the boundary between the cells (C3, C1). <IMAGE>
申请公布号 DE4433523(C2) 申请公布日期 2002.06.27
申请号 DE19944433523 申请日期 1994.09.20
申请人 MITSUBISHI DENKI K.K., TOKIO/TOKYO 发明人 FUJINAGA, MASATO
分类号 C30B25/16;C23C16/52;C23F4/00;G06F17/50;G06F19/00;H01L21/00;H01L21/203;H01L21/205;H01L21/302;H01L21/3065;(IPC1-7):H01L21/66;H01L21/306;H01L21/20;G06F17/00 主分类号 C30B25/16
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