APPARATUS FOR CLEANING QUARTZ PARTS OF EQUIPMENT FOR FABRICATING SEMICONDUCTOR

摘要

PURPOSE: An apparatus for cleaning quartz parts of equipment for fabricating a semiconductor is provided to stably clean the quartz parts and to minimize waste of the quartz parts, by stopping a basket loaded with the quartz part transferring in a chemical bath while the basket does not collide with a pillar or wall of the chemical bath. CONSTITUTION: Chemicals is received in the chemical bath(10). The basket(20) loaded with the quartz parts(P) is inserted into the chemical bath and is transferred. The quartz part passing through the chemical bath is rinsed in a deionized water bath(30). A damping stopper(13) comes in contact with the front end of the basket to control the transfer of the basket, disposed in the transfer path of the basket of the chemical bath and separated from the wall of the chemical bath by a proper interval.