SPUTTERING TARGET SINTERED MATERIAL FOR FORMING PHOTORECORDING MEDIUM PROTECTIVE LAYER EXHIBITING EXCELLENT CRACKING DAMAGE RESISTANCE IN HIGH OUTPUT SPUTTERING CONDITION

摘要

PROBLEM TO BE SOLVED: To provide a target material for forming a photorecording medium protective layer which is consisting of a hot press sintered body of a powdery mixture having a blended composition consisting of 6 to 40% SiO2 and 1 to 6% MgO, and the balance ZnS and exhibits excellent cracking damage resistance in a high output sputtering condition. SOLUTION: The target material for forming a photorecording medium protective layer is consisting of a hot press sintered body of a powdery mixture having a blended composition consisting of, by mol, 6 to 40% silicon oxide and 1 to 6% magnesium oxide, and the balance zinc sulfide.