| 摘要 |
PROBLEM TO BE SOLVED: To miniaturize a package without having a bad influence on the function of a vibration-type gyroscope in an angular-velocity measuring apparatus in which a vibrator and a support substrate are housed inside the package. SOLUTION: The angular-velocity measuring apparatus 1A detects a rotation angular velocity around a prescribed rotation axis Z. The apparatus is provided with the vibrator 12, a vibrator support member 9 supporting the vibrator 12, a circuit board 6 supporting the support member 9 and a semiconductor integrated-circuit chip 8 used to control the signal of the vibrator. The chip 8 is flip-chip-mounted on the circuit board 6, and the support member 9 is installed on the chip 8. |
