| 摘要 |
PROBLEM TO BE SOLVED: To permit rapid and stable inspection markedly accurate as compared with visual examination in a method for inspecting an edge flaw and to realize the inspection of a surface flaw and the inspection of an edge flaw within a real time only, by providing a simple time lag processing means to a surface inspection device used and arranged heretofore. SOLUTION: A straightly advancing or revolving substrate to be inspected is scanned by the laser beam from a light source so that the laser beam straightly passes along one surface of the substrate to be inspected from the outside of one edge of the substrate to be inspected to the outside of the other edge thereof, and the reflected beam from the surface of the substrate to be inspected in the laser beam is detected by a light detection sensor to be processed by a surface flaw processing means to inspect the surface flaw of the substrate to be inspected. In an inspection method uitilizing this inspection method to detect not only a surface flaw but also an edge flaw at the same time, the time lag processing means for processing the output signal from the light detection sensor corresponding to the presence of the reflected beam from the edge of the substrate to be inspected is provided and, when a time lag is generated in the comparison with a normal time when no flaw is present in the edge of the substrate, an abnormal time wherein a flaw is present in the edge of the substrate is judged.
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