| 摘要 |
PROBLEM TO BE SOLVED: To provide a thin plate inspection device capable of feeding a thin plate without damaging the same, capable of easily correcting angular shift and capable of easily corresponding to a size change. SOLUTION: In the thin plate inspection device for feeding the thin plate 4 such as a liquid crystal substrate or the like to the inspection station 3 on a surface plate 2 to inspect the same, a thin plate transfer means 6 for grasping the front end 5 of the thin plate 4 to transfer the same on the surface plate 2, air sliders 7 provided on the surface plate 2 before and behind the inspection station 3 and floating the transferred thin plate 4 by air, and air bearings 8 provided to the inspection station 3 and performing the blowing and sucking of air with respect to the thin plate 4 at the same time to adjust the floating height of the thin plate 4, are provided.
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