| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide an acoustic resonator which is capable of lessening the electromagnetical influence on a filter and a method of manufacturing for the same. SOLUTION: The method of subjecting the acoustic resonator to batch processing includes a process step of depositing a first electrode on the surface of a substrate, a process step of depositing a layer of a dielectric material on the first electrode and depositing a second electrode on the layer of the piezoelectric material and a process step of reducing the thickness of the substrate (200) by removing the material from the base surface of the substrate (200). The thickness of the substrate (200) is reduced, by which the electromagnetical influence occurring in image current is lessened.</p> |
