| 摘要 |
PROBLEM TO BE SOLVED: To provide a device and a method for inspecting a photodetector achieving the improvement of accuracy and stability of the inspection and capable of providing a photodetector having high reliability. SOLUTION: The device for inspecting the photodetector, which includes at least one light-receiving surface and outputs a photodetecting signal depending on a light irradiation level to the light-receiving surface, comprises light irradiation means (11, 12, 13, 14a, 14b) for irradiating the receiving-surface of the photodetector with an inspection light of a predetermined level and scanning the inspection light on the light-receiving surface, and an image-processing section 24 for creating image data for detecting a defect of the photodetector based on the photodetecting signal having the level depending on the presence or absence of the defect of the light-receiving surface at the scanning of the inspection light on the light-receiving surface.
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