| 摘要 |
<p>PROBLEM TO BE SOLVED: To accurately and simply adjust the height of a sample 1 in a photoelectric spectroscopic analysis device for irradiating the sample 1 with X-rays 3' from an X-ray source 3 and detecting photoelectrons 4 emitted from the sample 1 by an energy analyzer 11. SOLUTION: A control device comprises a unit 14 for computing/comparing the number of photoelectrons and a unit 10 for controlling sample stage drive motors and moves the sample 1 to a plurality of locations of measurement of different height and performs photoelectron measurement at each location of measurement by instructions from the unit 10 for controlling sample stage drive motors. From detection signals of the energy analyzer at each location of measurement, the amount of photoelectrons emitted at the locations of measurement is computed and compared by the unit 14 for computing/comparing the number of photoelectrons. On the basis of the results of the computations and comparisons, the sample 1 is moved to an optimal location of measurement at which the amount of emitted photoelectrons becomes a maximum to adjust its height.</p> |
