NON-IONIC COMPOUND, RESIN, RESIST COMPOSITION AND METHOD FOR PRODUCING RESIST PATTERN

摘要

The present invention has a purpose of providing a non-ionic compound, a resin, a resist composition used in a resist composition being able to produce a resist pattern with less defects and excellent CD uniformity. A resin including a structural unit derived from a non-ionic compound with a group represented by Formula (Ia) and a resist composition containing the resin. In Formula (Ia), R2 represents a group having an alicyclic hydrocarbon group with 3 to 18 carbon atoms. Rf1 and Rf2 each represent independently a perfluoroalkyl group with 1 to 4 carbon atoms, and an asterisk mark(*) represents a bonding hand.