| 摘要 |
PURPOSE: A gray tone mask and a method for producing the same are provided to easily give a gray tone mask having high uniformity of thickness of a translucent film. CONSTITUTION: A translucent film(12), an etching stopper film(13), a light shielding film(14) and a resist film are successively formed on a transparent substrate(11). The resist film on a part where a light transmissive part is formed(C) is removed and the light shielding film and the etching stopper film on this part are removed. The resist on a part where a translucent part is formed(A) is then removed, the light shielding film on this part is removed to form the translucent part and the translucent film on the area C is removed to form the light transmissive part. The objective gray tone mask is thus produced.
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