| 摘要 |
PROBLEM TO BE SOLVED: To provide a method of manufacturing a stable tin-nickel alloy film free from nonequilibrium NiSn phase. SOLUTION: A tin layer and a nickel layer are successively deposited on a prescribed substrate, respectively, to form a multilayered film consisting of the tin layer and the nickel layer. Then, the multilayered film is irradiated with laser beam to allow a tin element constituting the tin layer to diffuse into the nickel layer, by which the tin-nickel alloy film composed of equilibrium phase, such as Ni3Sn phase, as a stable phase can be manufactured. |
