VACUUM PUMP CONTROLLING DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a vacuum pump controlling device capable of effectively using energy generated with regenerative braking in speed reduction of the vacuum pump. SOLUTION: This vacuum pump control device is provided with the vacuum pump having a rotary shaft is supported to a magnetic bearing in non-contact therewith, a regenerative power control circuit 9 converting the regenerative braking energy of a motor 8 generated in the speed reduction of the vacuum pump into a regenerative power, and functions 1, 2, 11 and 13 for effectively using the power to others.