发明名称 |
Rapid cooling of cz silicon crystal growth system |
摘要 |
<p>A Czochralski method for producing monocrystals wherein a single crystal silicon rod (13) is pulled from a silicon melt (9) contained in a crucible (3) within a chamber (1). After pulling the single crystal silicon rod (13) from a silicon melt (9) in a chamber (1), the chamber (1) is cooled by flowing a gas having a thermal conductivity of at least about 55x10<-5> g.cal./(sec. &cirf& cm<2>) ( DEG C/cm) at 800 DEG K into the chamber (1). The preferred cooling gas is a helium-containing gas. <IMAGE></p> |
申请公布号 |
EP0785298(B1) |
申请公布日期 |
2002.06.26 |
申请号 |
EP19970300038 |
申请日期 |
1997.01.06 |
申请人 |
MEMC ELECTRONIC MATERIALS, INC. |
发明人 |
BANAN, MOHSEN;KIM, KYONG-MIN;KORB, HAROLD W. |
分类号 |
C30B15/00;C30B15/14;C30B29/06;H01L21/208;(IPC1-7):C30B15/14 |
主分类号 |
C30B15/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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