| 摘要 |
PURPOSE: An apparatus for measuring biomagnetic and a manufacturing method thereof are provided to prevent the external magnetic noise by forming a high temperature superconductor thin film so as to represent diamagnetic property. CONSTITUTION: A superconductive quantum interference device(79) is formed on one side of a double-sided substrate(78). A flux transformer(81) is provided on the side of the double-sided substrate(78). A substrate(71) is provided on the other side of the double-sided substrate(78). The substrate(71) is provided with a fourth high temperature superconductor thin film(80) for preventing an external magnetic noise of the superconductive quantum interference device(79). The flux transformer(81) is deposited on the substrate(71) over 2000Å thickness.
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