| 摘要 |
PROBLEM TO BE SOLVED: To secure high positioning accuracy by attenuating the resonance near a Nyquist frequency determined by a controlled variable sampling frequency actively and at the same time, attenuating the resonance mode of a higher frequency. SOLUTION: The device is provided with a control object constituted by adding a rigid body mode to the resonance mode, a digital controller adding the input of acceleration dimension, an actuator including a driver transmitting input to the control object and a circuit sampling the controlled variable and the device controls the position of the control object. The device is also provided with a filter adjusting a phase so that the phase at the lowest frequency of a first resonance mode comes close to -450 degrees from -270 degrees in the resonance modes whose gains exceed OdB in the open loop frequency responses of all of the controller, its operation time delay, the driver, the actuator and the control object.
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