| 摘要 |
PROBLEM TO BE SOLVED: To easily and quickly correct distances in X- and Y-directions between a probe and a TAB. SOLUTION: This device is provided with a probe card 2, the TAB 1, a processing unit 7 and an automatic XY-directional moving mechanism 10. Position coordinates 5A of one optional probe 2A1, and position coordinates 5B of a test pad 1C1 to contact with the probe 2A1 are registered in the processing unit 7 (signal S1 in Figure 1) to compute the correction distances X, Y, and signals S23 corresponding to the distances X, Y are input to the moving mechanism 10 to move the probe card 2 by the distances X, Y with respect to the TAB 1.
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