发明名称 DETECTOR FOR CHEMICAL SUBSTANCE
摘要 PROBLEM TO BE SOLVED: To provide a detector by which a chemical substance can be detected with high accuracy. SOLUTION: A partition 15 having an ion passage hole 29 is installed inside the flight chamber 20 of a time-of-flight mass spectrometric analytical means 19, and the inside of the flight chamber 20 is partitioned into a first space 26 communicating with an ionization chamber 2 and a second space 27 containing an ion detector 22. A pump 28 for differential pumping is connected to the second space 27. As a result, a pressure inside the second space 27 can be made lower than a pressure inside the first space 26, and the noise of the ion detector 22 inside the second space 27 can be reduced. As a result, the measurement sensitivity of the time-of-flight mass spectrometric analytical means 19 is enhanced, and a specific chemical substance can be detected with high accuracy.
申请公布号 JP2002181789(A) 申请公布日期 2002.06.26
申请号 JP20000385983 申请日期 2000.12.19
申请人 MITSUBISHI HEAVY IND LTD 发明人 DANNO MINORU;YAMAKOSHI HIDEO;TSURUGA SHIGENORI;KURIBAYASHI SHIZUMA;YAMASHITA ICHIRO
分类号 G01N27/62;G01N27/64;H01J49/16;H01J49/40;H01J49/42;(IPC1-7):G01N27/62 主分类号 G01N27/62
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