发明名称 RADIATION DETECTING DEVICE AND RADIATION IMAGE PICKUP SYSTEM USING THE SAME
摘要 PROBLEM TO BE SOLVED: To provide a radiation detecting device superior in durability and reliability in which substrate connecting parts are improved in moisture resistance and rigidity. SOLUTION: A plurality of pixels with TFTs for transfer and capacitors for accumulation are arranged on a substrate 1 for accumulation and transfer and electrically connected to a single-crystal semiconductor substrate 3 via bump metal for connection and conductive adhesives 2 arranged on the capacitors. A membrane high-voltage impressing layer 4 is formed in a surface protective substrate 5, and the single-crystal semiconductor substrate 3 and the conductive adhesives 6 are used for electric connection. The circumferences of the substrate 1 for accumulation and transfer and the upper surface protective substrate 5 are sealed through the use of a thermosetting-type epoxy- or acrylic- based sealant 7 in such a way as to cover the end surfaces of the upper surface protective substrate 5.
申请公布号 JP2002181949(A) 申请公布日期 2002.06.26
申请号 JP20000374739 申请日期 2000.12.08
申请人 CANON INC 发明人 KOIKE TOSHIKO
分类号 G01T7/00;G01T1/20;G01T1/24;H01L27/14;H01L31/09;H04N5/32;(IPC1-7):G01T7/00 主分类号 G01T7/00
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