摘要 |
PROBLEM TO BE SOLVED: To provide a radiation detecting device superior in durability and reliability in which substrate connecting parts are improved in moisture resistance and rigidity. SOLUTION: A plurality of pixels with TFTs for transfer and capacitors for accumulation are arranged on a substrate 1 for accumulation and transfer and electrically connected to a single-crystal semiconductor substrate 3 via bump metal for connection and conductive adhesives 2 arranged on the capacitors. A membrane high-voltage impressing layer 4 is formed in a surface protective substrate 5, and the single-crystal semiconductor substrate 3 and the conductive adhesives 6 are used for electric connection. The circumferences of the substrate 1 for accumulation and transfer and the upper surface protective substrate 5 are sealed through the use of a thermosetting-type epoxy- or acrylic- based sealant 7 in such a way as to cover the end surfaces of the upper surface protective substrate 5.
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