摘要 |
PROBLEM TO BE SOLVED: To provide a spectrometric device acquiring spectral information related to each position of a two-dimensional measured region of a specimen and acquiring secondary spectrometric information by rapidly processing the spectral information. SOLUTION: This spectrometric device is provided with a spectroscope 4 making light coming from a Y-direction linear region 2b of a measured region 2a of the specimen 2, into measuring light of two-dimensional cross section by wavelength dispersion in an X-direction; a two-dimensional CCD 6 receiving the measuring light; and a CPU 8 carrying out arithmetic processing based on spectrometric information acquired from the CCD 6. The CCD 6 has elements E arranged in X-Y directions. The CCD 6 is provided with a light receiving region 6a comprising a two-dimensional array of the elements E and receiving the measuring light, and a read register region 6b adjacently arranged in the Y-direction continuously with the light receiving region 6a. The register region 2b comprises register parts each comprising the two-dimensional array of the elements E and continuously arranged in the Y-direction adjacent to the light receiving region 6a. The CPU 8 carries out arithmetic processing using the spectral information outputted from the register parts.
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