发明名称 SEMICONDUCTOR DEVICE TESTING APPARATUS
摘要 PROBLEM TO BE SOLVED: To shorten the transmission time of parameters to respective semiconductor devices to be tested in a semiconductor device testing apparatus setting parameters of different values to individual semiconductor devices to be tested to test a plurality of the semiconductor devices to be tested at the same time. SOLUTION: A changeover means MUX is provided to each of test pattern supply routes and, by this changeover means, a state applying a terst pattern to each semiconductor device to be tested and a state applying an original parameter to each semiconductor device to be tested can be changed over.
申请公布号 JP2002181902(A) 申请公布日期 2002.06.26
申请号 JP20000384753 申请日期 2000.12.19
申请人 ADVANTEST CORP 发明人 KOZUKA NORIYOSHI
分类号 G01R31/28;G01R31/3183;(IPC1-7):G01R31/28;G01R31/318 主分类号 G01R31/28
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