摘要 |
PROBLEM TO BE SOLVED: To shorten the transmission time of parameters to respective semiconductor devices to be tested in a semiconductor device testing apparatus setting parameters of different values to individual semiconductor devices to be tested to test a plurality of the semiconductor devices to be tested at the same time. SOLUTION: A changeover means MUX is provided to each of test pattern supply routes and, by this changeover means, a state applying a terst pattern to each semiconductor device to be tested and a state applying an original parameter to each semiconductor device to be tested can be changed over.
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