METHOD FOR MANUFACTURING MICROLENS SUBSTRATE, MICROLENS SUBSTRATE, METHOD FOR MANUFACTURING ELECTROOPTICAL DEVICE, ELECTROOPTICAL DEVICE, AND PROJECTION TYPE DISPLAY DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a method for manufacturing a microlens substrate, a microlens substrate, a method for manufacturing an electro-optic device, an electro-optic device and a projection display device in which the quality of images can be improved by improving the shape accuracy of the microlens. SOLUTION: In the manufacturing process of a counter substrate (microlens substrate) of a liquid crystal device, a mask layer 60 having openings 61 as small as 0.5 to 4 μm diameter for substrate etching is formed on the surface of a first transparent substrate 20, the surface of the counter substrate 20 is subjected to wet etching through the openings 61 for substrate etching to form a recessed curved part 26, and then the recessed curved part 26 is filled with a transparent material to form the microlens substrate.